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What Is Wafer Dicing?

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brian martin
What Is Wafer Dicing?

Wafer dicing is the process of cutting or simulating a wafer into individual dice or chips. This process is necessary for semiconductor manufacturers to meet the growing demand for high-density electronics. The resulting die can be used as the basic components for integrated circuits, or assembled into systems-in-packages (SiPs) that pack more computing power in a smaller package.


Dicing a wafer requires the use of specialized equipment and the skills of experienced operators. The resulting dice must be sized and assembled correctly to maximize functionality while minimizing costs. Several dicing methods are available, and the best choice is dependent on a variety of factors.


The most common dicing technique is blade dicing. This method is cost-effective and has been the standard in the industry for decades. However, it has some limitations such as chipping and yielding. To overcome these limitations, the dicing process can be optimized by combining feed rate with the proper blade selection and process parameters.


Another method is laser ablation dicing. This method utilizes a pulsed or continuous wave laser to make the cut through the wafer down to the bottom surface of the wafer. Cooling water is used to protect the wafer from damage, as the heat from the laser is intense.


Plasma dicing is also a viable option for some applications, such as those in the micro-electro-mechanical system (MEMS) market. Plasma dicing can free up the wafer real estate previously sacrificed for the mechanical dicing method, allowing device designers to allocate additional die to active areas of the wafer.


Other dicing techniques, such as stealth dicing and multi-beam laser grooving, are also compatible with ultra low-k dielectric materials. They can also offer device designers the opportunity to improve die performance by using narrower dicing lanes.


Achieving maximum throughput during dicing is important for the IC manufacturer, but this process can be challenging to optimize. For example, if the wafer is subject to high thermal stress during dicing, this can cause back-side chipping.


To avoid this, the dicing process must be optimized by carefully controlling the multiple variables that are affected by these properties, such as material hardness, brittleness and thickness. Proper blade cooling and coolant nozzle adjustment can also help reduce this problem.


Before dicing starts, the wafer is placed on a metal saw-cutting ring, which is surrounded by a disk of particle-free paper to protect the wafer from damage and ensure the best possible alignment for dicing. Once the wafer is properly aligned, it is loaded onto the saw and sliced into dice.


The cut dice can be subsequently removed from the wafer, and packed into smooth-fitting packages or directly placed on a circuit board. The tape on which the cut die is mounted may be 80 to 95 um thick, and the adhesive must be able to hold each dice in place during cutting while releasing it easily upon removal.


The resulting dice can be shaped by shaping the tape around them or using the edge of the tape to create shapes such as squares, rectangular forms and straight lines. Once dice are formed, the wafer is moved to a cleaner that uses a high-pressure jet of cooling water to wash away any residual dust. This helps remove any silicon dust that could adhere to the bond pads after dicing.

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