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Dicing Silicon Wafers Using Abrasive Sawing and Water Jet Guided Laser

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Amelia Smith
Dicing Silicon Wafers Using Abrasive Sawing and Water Jet Guided Laser

Whether you're new to dicing or an experienced user, you'll find information here on everything from abrasive sawing to principles of dicing to water jet-guided lasers. You'll learn how to protect your substrate from the damage of flanges and how to select the right dicing blades and cutting components.


Compatibility of dicing blades and cutting components


During the dicing of semiconductor dicing wafers, it is important to monitor flange clearance. This clearance allows for the safe operation of the dicing saw system. In addition, it allows for effective blade coolant flow. Excessive wear of the dicing blade can also lead to damage to the wafer.


The primary object of the present invention is to improve the monitoring of flange clearance. This is done through a measurement of the wear of the dicing blade and its flange. This information is then used by a processor to determine the clearance.


This flange can be made of aluminum or another stiff material. The flange is typically positioned on the spindle of the dicing saw. The flange is preferably ten times the thickness of the blade. This provides the maximum rigidity for the dicing blade while still maintaining its thinness.


Principles of dicing


Traditionally, the process of dicing a silicon wafer to create chips was done using a laser or saw. Today, the industry has begun to develop novel dicing technologies to improve throughput and edge quality.


Dicing a silicon wafer can be a complicated process, which can be affected by many factors. For example, the environment, the cutting process, and the workplace can affect the quality of the cut.


A dual-laser beam asynchronous dicing method is being developed to improve the cutting performance of SiC wafers. This technology is suitable for dicing hard-brittle materials.


Another new technology, plasma dicing, is also a promising alternative to conventional dicing methods. The process uses a gas, such as SF6, to create deep trenches in the wafer. This method can generate non-rectangular cuts and is especially effective on delicate devices.


Abrasive sawing

Using abrasive sawing for semiconductor dicing involves a series of cuts through the wafer. The blade, usually diamond, grinds away material on a nano level. This creates mechanical stress that forces the wafer into the blade. The abrasive blade rotates at between 15,000 and 30,000 RPM. Depending on the materials being diced, the blade may be either coated with abrasive grit or soft metal.


A blade is typically composed of a sintered diamond. This hard particle holds the diamond in place for a long time. It also maintains a sharp edge for a long time. The tip of the blade can be very thin diamond or extremely thick.

The blade is mounted on a spindle. It is also rotated about the spindle axis. The spindle is controllable. The blade is rotated at a predetermined rotational rate. The spindle is also used to make height-sensing movements.


Water jet-guided laser


Using a water jet-guided laser for semiconductor dicing is a very useful technique. This method of machining is particularly effective with thin wafers. It produces clean cuts in a single step.


The cutting speed of the water-jet-guided laser is faster than that of mechanical dicing methods. This is because the molten material is not adhered to the wafer. The kerf width is also consistent because of the laminarity of the water jet.

The use of this technique eliminates thermal damage and mechanical damage. It is also gentle on the wafer. Its kerf quality is higher than that of abrasive sawing.


The kerfs are shallow and can be positioned close to the active area. This increases the number of chips that can be produced per wafer.


Preventing flanges from contacting the substrate


Performing the right wafer dicing steps is a matter of meticulous attention to detail and accurate positioning of the blade, flanges, and wafer. Having a dicing saw with a programmable feature can be advantageous, as it allows the operator to perform multiple dicing steps within a single operation. During dicing, it is important to ensure that the flanges don't contact the substrate. This can happen due to incorrect assembly, improper handling, and other unforeseen conditions.


The dicing saw can be located over the center of the substrate or can be programmable, such that the blade is aligned at the edges of the wafer. The dictating saw can be mounted on a spindle, which rotates relative to the center of the substrate. The dicing saw can be used for a number of applications, including the dicing of blank wafers, as well as the dicing of the semiconductor die.

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